A Microdischarge-Based Monolithic Pressure Sensor
نویسندگان
چکیده
منابع مشابه
MICRODISCHARGE-BASED PRESSURE SENSORS FOR OPERATION AT 1000oC
* 1301 Beal Ave., Ann Arbor, MI 48109, USA; Tel: (734) 763-6132, E-mail: [email protected] ABSTRACT This paper reports microdischarge-based pressure sensors which operate by measuring the change in spatial current distribution of pulsed DC microdischarges. The sensors are composed of 3D arrays of horizontal bulk metal electrodes embedded in quartz substrates. Microdischarge-based pressure sens...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2014
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2014.2312174